了得網其他分類_芯片制造——半導體工藝制程實用教程(第6版) 英文版 (美)彼得·

●Contents 1 The Semiconductor Industry 1 Introduction 1 Birth of an Industry 1 The Solid-State Era 3 Integrated Circuits (ICs) 4 Process and Product Trends 5 Moore’s Law 6 Decreasing Feature Size 6 Increasing Chip and Wafer Size 8 Reduction in Defect Density 9 Increase in Interconnection Levels 10 The Semiconductor Industry Association Roadmap 10 Chip Cost 11 Industry Organization 11 Stages of Manufacturing 12 Six Decades of Advances in Microchip Fabrication Processes 14 The Nano Era 16 Review Topics 17 References 17 2 Properties of Semiconductor Materials and Chemicals 19 Introduction 19 Atomic Structure 19 The Bohr Atom 19 The Periodic Table of the Elements 20 Electrical Conduction 23 Conductors 23 Dielectrics and Capacitors 23 Resistors 24 Intrinsic Semiconductors 24 Doped Semiconductors 25 Electron and Hole Conduction 26 Carrier Mobility 28 Semiconductor Production Materials 29 Germanium and Silicon 29 Semiconducting Compounds 29 Silicon Germanium 31 Engineered Substrates 31 Ferroelectric Materials 31 Diamond Semiconductors 32 Process Chemicals 32 Molecules, Compounds, and Mixtures 32 Ions 33 States of Matter 34 Solids, Liquids, and Gases 34 Plasma State 34 Properties of Matter 34 Temperature 34 Density, Specic Gravity, and Vapor Density 35 Pressure and Vacuum 36 Acids, Alkalis, and Solvents 37 Acids and Alkalis 37 Solvents 38 Chemical Purity and Cleanliness 38 Safety Issues 38 The Material Safety Data Sheet 39 Review Topics 39 References 39 3 Crystal Growth and Silicon Wafer Preparation 41 Introduction 41 Semiconductor Silicon Preparation 41 Silicon Wafer Preparation Stages 42 Crystalline Materials 42 Unit Cells 43 Poly and Single Crystals 43 Crystal Orientation 44 Crystal Growth 45 Czochralski Method 45 Liquid-Encapsulated Czochralski 47 Float Zone 47 Crystal and Wafer Quality 49 Point Defects 49 Dislocations 50 Growth Defects 50 Wafer Preparation 51 End Cropping 51 Diameter Grinding 51 Crystal Orientation, Conductivity, and Resistivity Check 51 Grinding Orientation Indicators 52 Wafer Slicing 53 Wafer Marking 54 Rough Polish 54 Chemical Mechanical Polishing 55 Backside Processing 55 Double-Sided Polishing 56 Edge Grinding and Polishing 56 Wafer Evaluation 56 Oxidation 57 Packaging 57 Wafer Types and Uses 57 Reclaim Wafers 57 Engineered Wafers (Substrates) 57 Review Topics 58 References 58 4 Overview of Wafer Fabrication and Packaging 59 Introduction 59 Goal of Wafer Fabrication 59 Wafer Terminology 59 Chip Terminology 61 Basic Wafer-Fabrication Operations 63 Layering 63 Patterning 64 Circuit Design 66 Reticle and Masks 68 Doping 69 Heat Treatments 69 Example Fabrication Process 72 Wafer Sort 74 Packaging 75 Summary 75 Review Topics 76 References 76 5 Contamination Control 77 Introduction 77 The Problem 77 Contamination-Caused Problems 80 Contamination Sources 81 General Sources 81 Air 81 Clean Air Strategies 82 Cleanroom Workstation Strategy 83 Tunnel or Bay Concept 85 Micro- and Mini-Environments 86 Temperature, Humidity, and Smog 87 Cleanroom Construction 88 Construction Materials 88 Cleanroom Elements 89 Personnel-Generated Contamination 93 Process Water 94 Process Chemicals 96 Equipment 99 Cleanroom Materials and Supplies 99 Cleanroom Maintenance 100 Wafer-Surface Cleaning 100 Particulate Removal 102 Wafer Scrubbers 102 High-Pressure Water Cleaning 103 Organic Residues 103 Inorganic Residues 103 Chemical-Cleaning Solutions 104 General Chemical Cleaning 104 Oxide Layer Removal 105 Room Temperature and Ozonated Chemistries 106 Water Rinsing 108 Drying Techniques 110 Contamination Detection 112 Review Topics 112 References 113 6 Productivity and Process Yields 115 Overview 115 Yield Measurement Points 115 Accumulative Wafer-Fabrication Yield 116 Wafer-Fabrication Yield Limiters 117 Number of Process Steps 118 Wafer Breakage and Warping 118 Process Variation 119 Mask Defects 120 Wafer-Sort Yield Factors 120 Wafer Diameter and Edge Die 121 Wafer Diameter and Die Size 122 Wafer Diameter and Crystal Defects 122 Wafer Diameter and Process Variations 123 Die Area and Defect Density 124 Circuit Density and Defect Density 125 Number of Process Steps 125 Feature Size and Defect Size 125 Process Cycle Time 125 Wafer-Sort Yield Formulas 125 Assembly and Final Test Yields 128 Overall Process Yields 128 Review Topics 129 References 130 7 Oxidation 131 Introduction 131 Silicon Dioxide Layer Uses 131 Surface Passivation 131 Doping Barrier 132 Surface Dielectric 132 Device Dielectric (MOS Gates) 133 Device Oxide Thicknesses 134 Thermal Oxidation Mechanisms 134 Influences on the Oxidation Rate 137 Thermal Oxidation Methods 140 Horizontal Tube Furnaces 140 Temperature Control System 141 Source Cabinet 143 Vertical Tube Furnaces 143 Rapid Thermal Processing 146 High-Pressure Oxidation 149 Oxidant Sources 151 Oxidation Processes 154 Preoxidation Wafer Cleaning 154 Postoxidation Evaluation 155 Surface Inspection 156 Oxide Thickness 156 Oxide and Furnace Cleanliness 156 Thermal Nitridation 156 Review Topics 157 References 157 8 The Ten-Step Patterning Process―Surface Preparation to Exposure 161 Introduction 161 Overview of the Photomasking Process 162 Ten-Step Process 165 Basic Photoresist Chemistry 167 Photoresist 167 Photoresist Performance Factors 169 Resolution Capability 169 Adhesion Capability 170 Process Latitude 171 Pinholes 172 Particle and Contamination Levels 173 Step Coverage 173 Thermal Flow 173 Comparison of Positive and Negative Resists 173 Physical Properties of Photoresists 175 Solids Content 175 Viscosity 175 Surface Tension 176 Index of Refraction 176 Storage and Control of Photoresists 176 Light and Heat Sensitivity 176 Viscosity Sensitivity 177 Shelf Life 177 Cleanliness 177 Photomasking Processes―Surface Preparation to Exposure 178 Surface Preparation 178 Particle Removal 178 Dehydration Baking 178 Wafer Priming 179 Spin Priming 180 Vapor Priming 180 Photoresist Application (Spinning) 181 The Static Dispense Spin Process 181 Dynamic Dispense 183 Moving-Arm Dispensing 183 Manual Spinners 183 Automatic Spinners 184 Edge Bead Removal 185 Backside Coating 185 Soft Bake 185 Convection Ovens 186 Manual Hot Plates 187 In-Line, Single-Wafer Hot Plates 187 Moving-Belt Hot Plates 187 Moving-Belt Infrared Ovens 188 Microwave Baking 188 Vacuum Baking 188 Alignment and Exposure 189 Alignment and Exposure Systems 189 Exposure Sources 191 Alignment Criteria 191 Aligner Types 193 Postexposure Bake 196 Advanced Lithography 198 Review Topics 198 References 198 9 The Ten-Step Patterning Process―Developing to Final Inspection 201 Introduction 201 Development 201 Positive Resist Development 201 Negative Resist Development 203 Wet Development Processes 203 Dry (or Plasma) Development 206 Hard Bake 207 Hard-Bake Methods 207 Hard-Bake Process 207 Develop Inspect 208 Develop Inspect Reject Categories 209 Develop Inspect Methods 209 Causes for Rejecting at the Develop Inspection Stage 211 Etch 212 Wet Etching 212 Etch Goals and Issues 212 Incomplete Etch 212 Overetch and Undercutting 213 Selectivity 214 Wet-Spray Etching 214 Silicon Wet Etching 214 Silicon Dioxide Wet Etching 215 Aluminum-Film Wet Etching 216 Deposited-Oxide Wet Etching 216 Silicon Nitride Wet Etching 216 Vapor Etching 217 Dry Etch 217 Plasma Etching 218 Etch Rate 220 Radiation Damage 220 Selectivity 220 Ion-Beam Etching 222 Reactive Ion Etching 222 Resist Effects in Dry Etching 223 Resist Stripping 223 Wet Chemical Stripping of Nonmetallized Surfaces 224 Wet Chemical Stripping of Metallized Surfaces 225 Dry Stripping 225 Post?Ion Implant and Plasma Etch Stripping 226 New Stripping Challenges 226 Final Inspection 227 Mask Making 227 Summary 229 Review Topics 229 References 230 10 Next Generation Lithography 233 Introduction 233 Challenges of Next Generation Lithography 233 High-Pressure Mercury Lamp Sources 235 Excimer Lasers 236 Extreme Ultraviolet 236 X-Rays 237 Electron Beam or Direct Writing 238 Numerical Aperture of a Lens 240 Other Exposure Issues 241 Variable Numerical Aperture Lenses 242 Immersion Exposure System 242 Amplified Resist 242 Contrast Effects 243 Other Resolution Challenges and Solutions 244 Off-Axis Illumination 245 Lens Issues and Reection Systems 245 Phase-Shift Masks 245 Optical Proximity Corrected or Optical Process Correction 245 Annular-Ring Illumination 246 Pellicles 247 Surface Problems 248 Resist Light Scattering 248 Subsurface Reectivity 248 Antireective Coatings 249 Standing Waves 249 Planarization 251 Photoresist Process Advances 252 Multilayer Resist or Surface Imaging 252 Silylation or DESIRE Process 254 Polyimide Planarization Layers 255 Etchback Planarization 256 Dual-Damascene Process 256 Chemical Mechanical Polishing 256 Slurry 259 Polishing Rates 259 Planarity 260 Post-CMP Clean 261 CMP Tools 261 CMP Summary 262 Reow 262 Image Reversal 262 Contrast Enhancement Layers 262 Dyed Resists 264 Improving Etch Denition 264 Lift-Off Process 264 Self-Aligned Structures 264 Etch Prole Control 266 Review Topics 266 References 266 11 Doping 269 Introduction 269 The Diffusion Concept 269 Formation of a Doped Region and Junction 271 The N-P Junction 272 Doping Process Goals 273 Graphical Representation of Junctions 273 Concentration versus Depth Graphs 273 Lateral Diffusion 273 Same-Type Doping 275 Diffusion Process Steps 275 Deposition 275 Dopant Sources 278 Drive-In Oxidation 280 Oxidation Effects 281 Introduction to Ion Implantation 281 Concept of Ion Implantation 283 Ion-Implantation System 284 Implant Species Sources 284 Ionization Chamber 284 Mass Analyzing or Ion Selection 284 Acceleration Tube 286 Wafer Charging 286 Beam Focus 287 Neutral Beam Trap 287 Beam Scanning 287 End Station and Target Chamber 289 Ion-Implant Masks 290 Dopant Concentration in Implanted Regions 291 Crystal Damage 292 Annealing and Dopant Activation 292 Channeling 293 Evaluation of Implanted Layers 294 Uses of Ion Implantation 295 The Future of Doping 297 Review Topics 297 References 298 12 Layer Deposition 299 Introduction 299 Film Parameters 301 Chemical Vapor Deposition Basics 302 Basic CVD System Components 303 CVD Process Steps 305 CVD System Types 305 Atmospheric-Pressure CVD Systems 306 Horizontal-Tube Induction-Heated APCVD 306 Barrel Radiant-Induction-Heated APCVD 307 Pancake Induction-Heated APCVD 307 Continuous Conduction-Heated APCVD 308 Horizontal Conduction-Heated APCVD 309 Low-Pressure Chemical Vapor Deposition 309 Horizontal Conduction-Convection-Heated LPCVD 309 Ultra-High Vacuum CVD 310 Plasma-Enhanced CVD (PECVD) 310 High-Density Plasma CVD 312 Atomic Layer Deposition 313 Vapor-Phase Epitaxy 315 Molecular Beam Epitaxy 315 Metalorganic CVD 317 Deposited Films 318 Deposited Semiconductors 318 Epitaxial Silicon 318 Polysilicon and Amorphous Silicon Deposition 324 SOS and SOI 325 Gallium Arsenide on Silicon 326 Insulators and Dielectrics 326 Silicon Dioxide 326 Doped Silicon Dioxide 327 Silicon Nitride 328 High-k and Low-k Dielectrics 329 Conductors 329 Review Topics 329 References 330 13 Metallization 333 Introduction 333 Deposition Methods 333 Single-Layer Metal Systems 334 Multilevel Metal Schemes 335 Conductors Materials 336 Aluminum 336 Aluminum-Silicon Alloys 336 Aluminum-Copper Alloy 337 Barrier Metals 338 Refractory Metals and Refractory Metal Silicides 338 Plugs 339 Sputter Deposition 340 Copper Dual-Damascene Process 345 Low-k Dielectric Materials 345 The Dual-Damascene Copper Process 346 Barrier or Liner Deposition 348 Seed Deposition 348 Electrochemical Plating 348 Chemical-Mechanical Processing 349 CVD Metal Deposition 349 Doped Polysilicon 349 CVD Refractory Deposition 350 Metal-Film Uses 351 MOS Gate and Capacitor Electrodes 351 Backside Metallization 351 Vacuum Systems 351 Dry Mechanical Pumps 352 Turbomolecular Hi-Vac Pumps 352 Review Topics 353 References 353 14 Process and Device Evaluation 355 Introduction 355 Wafer Electrical Measurements 356 Resistance and Resistivity 356 Resistivity Measurements 356 Four-Point Probe 356 Process and Device Evaluation 358 Sheet Resistance 358 Four-Point Probe Thickness Measurement 358 Concentration or Depth Prole 359 Secondary Ion Mass Spectrometry 359 Optically Modulated Optical Reflection (Thermawave) 360 Physical Measurement Methods 360 Layer Thickness Measurements 360 Color 360 Spectrophotometers or Reectometry 361 Ellipsometers 363 Stylus (Surface Prolometers) 363 Photoacoustic 365 Four-Point Probe 365 Ultra-Thin MOSFET Gate Thickness 365 Gate Oxide Integrity Electrical Measurement 365 Junction Depth 365 Groove and Stain 365 Scanning Electron Microscope Thickness Measurement 367 Spreading Resistance Probe 367 Secondary Ion Mass Spectrometry 367 Scanning Capacitance Microscopy 368 Scanning Electron Microscope Thickness Measurement 368 Critical Dimensions and Line-Width Measurements 369 Optical Image-Shearing Dimension Measurement 369 Shape Metrology and Optical Critical Dimension 370 Contamination and Defect Detection 370 1× Visual Surface Inspection Techniques 370 1× Collimated Light 370 1× Ultraviolet 372 Microscope Techniques 372 Automated In-Line Defect Inspection Systems 376 General Surface Characterization 378 Atomic Force Microscopy 378 Scattrometry 380 Contamination Identication 380 Auger Electron Spectroscopy 380 Electron Spectroscope for Chemical Analysis 381 Time of Flight Secondary Ion Mass Spectrometry 381 Evaluation of Stack Thickness and Composition 382 Device Electrical Measurements 382 Equipment 383 Resistors 383 Diodes 384 Bipolar Transistors 386 MOS Transistors 387 Capacitance-Voltage Profiling 387 Device Failure Analysis―Emission Microscopy 390 Review Topics 390 References 391 15 The Business of Wafer Fabrication 393 Introduction 393 Moore’s Law and the New Wafer-Fabrication Business 393 Wafer-Fabrication Costs 394 Overhead 395 Materials 395 Equipment 396 Labor 397 Production Cost Factors 397 Yield 398 Yield Improvements 398 Yield and Productivity 399 Increasing Wafer Diameters 400 Book-to-Bill Ratio 401 Cost of Ownership 402 Automation 402 Process Automation 402 Wafer-Loading Automation 403 Clustering 403 Wafer-Delivery Automation 404 Closed-Loop Control-System Automation 405 Factory-Level Automation 405 Equipment Standards 407 Fab Floor Layout 407 Batch versus Single-Wafer Processing 407 Green Fabs 408 Statistical Process Control 409 Inventory Control 412 Just-in-Time Inventory Control 413 Quality Control and Certication―ISO 9000 414 Line Organization 414 Review Topics 415 References 416 16 Introduction to Devices and Integrated Circuit Formation 417 Introduction 417 Semiconductor-Device Formation 417 Resistors 418 Capacitors 420 Diodes 422 Transistors 424 Field-Effect Transistors 427 Alternatives to MOSFET Scaling Challenges 434 Conductors 434 Integrated-Circuit Formation 436 Bipolar Circuit Formation 437 MOS Integrated Circuit Formation 441 Bi-MOS 445 Silicon on Insulator Isolation 445 System on (a) Chip 446 Superconductors 446 Microelectromechanical Systems 447 Strain Gauges 447 Batteries 447 Light-Emitting Diodes 447 Optoelectronics 448 Solar Cells 448 Temperature Sensing 448 Acoustic Wave Devices 448 Review Topics 449 References 449 17 Process and Device Evaluation 451 Introduction 451 Circuit Basics 451 Integrated Circuit Types 454 Logic Circuits 454 Memory Circuits 457 Redundancy 461 The Next Generation 462 Review Topics 464 References 464 18 Packaging 465 Introduction 465 Chip Characteristics 466 Package Functions and Design 468 Substantial Lead System 468 Physical Protection 468 Environmental Protection 469 Heat Dissipation 469 Common Package Parts 469 Cleanliness and Static Control 471 Basic Bonding Processes 472 Wire Bonding Process 473 Prebonding Wafer Preparation 473 Die Separation 474 Die Pick and Place 475 Die Inspection 476 Die Attach 476 Wire Bonding 477 Tape Automated Bonding Process 480 Bump or Ball Flip-Chip Bonding 480 Example Bump or Ball Process 482 Copper Metallization (Damascene) Bump Bonding 482 Reow 483 Die Separation and Die Pick and Place 483 Alignment of Die to Package 483 Attachment to Package (or Substrate) 483 Deux 483 Underllment 484 Encapsulation 484 Postbonding and Preseal Inspection 484 Sealing Techniques 484 Lead Plating 486 Plating Process Flows 487 Lead Trimming 487 Deashing 488 Package Marking 488 Final Testing 489 Environmental Tests 489 Electrical Testing 490 Burn-In Tests 491 Package Design 491 Metal Cans 492 Pin Grid Arrays 493 Ball-Grid Arrays or Flip-Chip Ball-Grid Arrays 493 Quad Packages 493 Thin Packages 494 Chip-Scale Packages 494 Lead on Chip 494 Three-Dimensional Packages 494 Stacking Die Techniques 495 Three-Dimensional Enabling Technologies 497 Hybrid Circuits 498 Multichip Modules 498 The Known Good Die Problem 498 Package Type or Technology Summary 499 Package or PCB Connections 499 Bare Die Techniques and Blob Top 500 Review Topics 500 References 501 Glossary 502 Index 521

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