Multilayer Integrated Film Bulk Acoustic Resonators mainly
introduces the theory, design, fabrication technology and
application of a recently devel-oped new type of device, multilayer
integrated film bulk acoustic resona-tors, at the micro and nano
scale involving microelectronic devices, integrated arcuits,
optical devices, sensors and actuators, acoustic resona-tors,
micro-nano manufacturing, multilayer integration, device theory and
design prinaples, etc. These devices can work at very high
frequencies by using the newly developed theory, design, and
fabrication technology ofnano and micro devices.
Readers in fields ofIC, electronic devices, sensors, materials,
and films etc. will benefit from this book by learning the detailed
fundamentals and potential applications of these advanced
devices.
Prof. Yafei Zhangis the director of the Ministry of Education's
Key Labora-tory for Tlhin Films and Microfabrication Technology,
PRC; Dr. Da Chenwas a PhD student in Prof. Yafei Zhang's research
group.