●Unit 1 Basis of Materials Science 1
1.1 Introduction 1
1.2 Materials Science and Engineering 3
1.3 Classification of Materials 8
1.4 Advanced Materials 14
1.5 Microstructure characterization of Materials 19
Unit 2 Plasmas 42
2.1 DC Glow Discharge 44
2.2 RF Discharges 47
2.3 High—Density Plasmas 50
Unit 3 Vacuum Technology 59
3.1 Pressure Ranges and Vacuum Pumps 60
3.2 Vacuum Seals and Pressure Measurement 69
Unit 4 Thin Film Deposition 76
4.1 Physical Deposition 77
4.2 Chemical Deposition 83
4.3 Epitaxial Growth 94
Unit 5 Devices Fabrication Process 102
5.1 Introduction 102
5.2 Ion implantation 103
5.3 Photolithography 105
5.4 Etch 109
5.5 Metallization 110
5.6 Process Integration 101
Unit 6 Reading Practice 128
6.1 Paper 128
6.2 Patent 140
6.3 Manual Guide 147
Unit 7 Writing Practice 160
7.1 Structure of Paper 160
7.2 Example 1 165
7.3 Example 2 171
